Electron beam microprobe
Electron beam microprobe, EM, microprobe, microprobe, an analytical instrument that can be used to determine the chemical compositions of the smallest subareas (1-2 μm diameter) of solids.
Elektronenstrahlmikrosondenanalytik
Image Credit: AG Mineralogie FU-Berlin
Building T – RoomT 033
Tel.: +49 30 838 70 869
Contact: Dr. Andreas Beinlich
E-Mail: andreas.beinlich@fu-berlin.de
User regulations: pdf herunterladen
The JEOL JXA 8200 Superprobe device is equipped with
- 5 crystal spectrometers (WDS) for elements starting from carbon (Z = 6)
- 1 energy-dispersive X-ray detector (EDS) for elements starting from sodium (Z = 11)
Areas of application
- Surface morphology (secondary electron detector)
- Element contrasts (backscattered electron detector)
- Qualitative analysis (EDS, WDS)
- Quantitative Point Analysis Against Standards (WDS)
- Element Distribution Images (WDS)